Dimensions of a cylindrical cassette with products (Ø*D), mm
380*500
Rotation speed of the product on a horizontal rod, rpm
1 - 50
Crucibles, pcs.
3
Inner diameter of crucibles, mm
70
Length of evaporated ingots, mm
500
Ingot feeding speed, mm/min
0.3 - 30
Electron guns for evaporating materials from crucibles, pcs.
3
Electron guns for heating products, pcs.
1
Rated power of the electron gun, kW
150
Rated operating accelerating voltage, kV
30
Operating vacuum in the coating chamber, Pa (mm Hg)
1*10-3 - 6*10-3 (1*10-5 – 5*10-5)
Airlock chamber evacuation time, min
2 - 3
Sluice gate opening time, s
8 - 10
Rated voltage of the three-phase alternating current supply network with a frequency of 50 Hz, V
400±10%
Cooling water pressure, Pa (kgf/cm2)
3*105 – 4*105 (3 - 4)
Installed power, kW
1100
Overall dimensions (L*W*H), mm 1
0900*9030*4500
Weight, kg
25000
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